عنوان

OSA proceedings on soft x-ray projection lithography: proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California

135586

135780

پا‌ئیز۲۸

English

)40(

OSA proceedings on soft x-ray projection lithography: proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California

Washington

The Society

1993

x, 226 p.: ill.; 29 cm

OSA proceedings on

v.18

Spine title: Soft x-ray projection lithography

"Supported by Air Force Office of Scientific Research, Defense Advance Research Projects Agency, Department of Energy"

Includes bibliographical references and index

Congresses ، X-ray lithography

7874

1993

edited by Andrew M. Hawryluk and Richard H. Stulen; sponsored by the Optical Society of America

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AU .H .R ,nelutS

CO Optical Society of America

TI Soft x-ray projection lithography