MOEMS 99: 3rd International Conference on Micro Opto Electro Mechanical Systems )Optical MEMS(: proceedings: August 31 - September 1, 1999, Mainz Hilton )Mainz, Germany(
Mainz, Germany
IMM
1999
250 p.; ill.; 28 cm
Includes bibliographical references and index
Congresses ، Microelectromechanical systems
Congresses ، Microfabrication
Congresses ، Optoelectronic devices
TK
7875
.
M53
1991
TI
sponsored by Controlware Gmbh, Dietzenbach, Germany, ... ]et al.[