عنوان
پدید آورنده
موضوع
رده
QC 166 .A1 .I55 1996
QC
166
.
A1
.
I55
1996
کتابخانه
محل استقرار
122398
زمستان۹۷
English
)50(
Papers from the 40th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 28-31 May 1996, Atlanta Marriott Marqurs, Atlanta, Georgia
New York
Published by the American Vacuum Society through the American Institute of Physics
1996
p. ]3619[-4379: ill.; 28 cm
Journal of vacuum science & technology B, and in a special casebound edition available to participants
vol.14, no.6
Includes bibliographical references and indexes
Congresses ، Photolithography
Congresses ، Lithography, Electron beam
Congresses ، Ion beam lithography
Congresses ، Nanotechnology
QC
166
.
A1
.
I55
1996
AU
sponsored by the American Vacuum Society in cooperation with the Electron Device Society of the Institute of Electrical and Electronics Engineers and the Optical Society of America; special editor for the proceedings: Stella W. Pang
AU .W alletS ,gnaP
CO American Vacuum Society
CO IEEE Electron Devices Society
CO Optical Society of America
TI
SE
International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication )40th: 1996: Atlanta, Georgia(
05
