Materials aspects in microsystem technologies: proceedings of Symposium H on Materials Aspects in Microsystem Technologies of the E-MRS 1998 spring conference, Strasbourg, France, June 16-19, 1998
Amsterdam
Elsevier
1999
257 p.; 29 cm
European Materials Research Society symposia proceedings
v.83
Reprinted from: Sensors and actuators, v.74, no. 1-3, 1999
Includes bibliographical references and index
Congresses ، Detectors
Congresses ، Microactuators
Congresses ، Microelectromechanical systems
Congresses ، Microelectronics
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1998
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