Materials and processes for submicron technologies: proceedings of Symposium N on Materials and Processes for Submicron Technologies of the E-MRS 1998 Spring Conference, Strasbourg, France, 16-19 June, 1998
Amsterdam
Elsevier
1999
1175 p.: ill.; 29 cm
European Materials Research Society symposia proceedings
89
Reprinted from Solid-state electronics, vol. 43, no. 6
Includes bibliographical references and indexes
Congresses ، Solid state physics
Congresses ، Solid state electronics
Congresses ، Microstructure
Congresses ، Nanotechnology
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1998
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edited by J.M. Martinez-Duart, R. Madar, R.A. Levy
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