عنوان
پدید آورنده
موضوع
رده
TK 153 .I35 1996
TK
153
.
I35
1996
کتابخانه
محل استقرار
122081
پاییز۹۷
English
)50(
IEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems: an investigation of micro structures, sensors, actuators, machines, and systems: proceedings, San Diego, California, USA, February 11-15, 1996
]New York[
Institute of Electrical and Electronics Engineers
1996
xxiv, 530 p.: ill.; 30 cm
"IEEE catalog number 96CH35856"
Includes bibliographical references
Congresses ، Electromechanical devices
Congresses ، Microelectronics
Congresses ، Detectors
Congresses ، Actuators
TK
153
.
I35
1996
AU
sponsored by the IEEE Robotics and Automation Society
CO IEEE Robotics and Automation Society
TI
IEEE Workshop on Micro Electro Mechanical Systems )9th: 1996: San Diego, Calif.(
05
