عنوان
پدید آورنده
موضوع
رده
TK 7874 .D4757 1999
TK
7874
.
D4757
1999
کتابخانه
محل استقرار
121545
121544
تابستان۹۷
English
)50(
Design, test, and microfabrication of MEMS and MOEMS: 30 March-1 April 1999, Paris, France
Bellingham, Wash., USA
SPIE
1999
2 v. )xix, 1192 p.(: ill. )some col.(; 28 cm
SPIE proceedings series
v.3680
Includes bibliographical references and index
Congresses ، Microelectromechanical systems-- Testing
Congresses ، Optoelectronic devices-- Testing
Congresses ، Micromachining
Congresses ، Computer-aided design
Congresses ، Detectors
TK
7874
.
D4757
1999
TI
Bernard Courtois ... ]et al.[, chairs/editors; sponsored by SPIE--the International Society for Optical Engineering, CNRS-INPG-UJF )France( in cooperation with IEEE Computer Society Test Technology Technical Committee
AU (dranreB) .B ,siotruoC
CO Society of Photo-optical Instrumentation Engineers
CO CNRS-INPG-UJF )France(
CO IEEE Comptuer Society. Test Technology Technical Committee
SE
05
05
