عنوان
پدید آورنده
موضوع
رده
TK 153 .I343 1994
TK
153
.
I343
1994
کتابخانه
محل استقرار
119231
119232
پائیز۸۷
English
)50(
IEEE micro electro mechanical systems: an investigations ]sic[ of micro structures, sensors, actuators, machines, and robotic systems:proceedings, Oiso, Japan, January 25-28, 1994
]New York
IEEE[
1994
xiv, 360 p.: ill.; 30 cm
"IEEE Workshop on Micro Electro Mechanical Systems"--p.iii
Title on spine: IEEE Micro Electro Mechanical Systems Workshop
Includes bibliographical references and index
Congresses ، Electromechanical devices
Congresses ، Microelectronics
Congresses ، Detectors
Congresses ، Actuators
TK
153
.
I343
1994
TI
sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center
CO IEEE Robotics and Automation Society
CO American Society of Mechanical Engineers. Dynamic Systems and Control Division
CO Micromachine Center )Japan(
CO IEEE Workshop on Micro Electro Mechanical Systems )4991: Oiso-machi, Japan(
TI IEEE micro electro mechanical systems workshop
TI Micro electro mechanical systems
05
05
