عنوان
پدید آورنده
موضوع
رده
TK 7871 .85 .I5864 1983
TK
7871
.
85
.
I5864
1983
کتابخانه
محل استقرار
78293
آخر۲۷
English
)40(
Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982
Berlin, New York
Springer-Verlag
1983
x, 556 p. : ill. ; 24 cm
Springer series in electrophysics, v. 11
Includes bibliographical references and index
، Ion implantation-- Congresses
، Semiconductor doping-- Congresses
TK
7871
.
85
.
I5864
1983
TI
editors, H. Ryssel and H. Glawischnig
AU renieH ,lessyR 1941-
AU .H ,ginhcsiwalG 1939-
CO International Conference on Ion Implantation: Equipment and Techniques) 4th:2891: Berchtesgaden, Germany(
SE
04
