عنوان

Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.

76990

78220

92366

آخر۲۷

English

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Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.

New York

North-Holland

1983

xiii, 298 p. : ill. ; 24 cm

Materials Research Society symposia proceedings, v. 71

"Sponsored by the Air Force Office of Scientific Research"--T.p. verso

Includes bibliographical references and indexes

، Lasers-- Industrial applications-- Congresses

، Semiconductors-- Congresses

1673

L355

1983

editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg

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