3540675825
English Book
Mechanical microsensors
M. Elwenspoek, R.J. Wiergerink
Berlin ; New York
Springer
,c2001
x, 295 p. ill. 25 cm.
Includes bibliographical references and index.
Detectors- Design and construction
Microelectromechanical systems- Design and construction
Transducers
Silicon
Micromachining
681
,.
2
,
E49
Elwenspoek, M.(Miko),1948-
Wiegerink, Remco J.,1964-
Title
