عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
0849309166
English Book
Nano- and microelectromechanical systems
fundamentals of nano- and microengineering
Sergey Edward Lyshevski
Boca Raton
CRC Press,
2001
338 p. ill.
Nano- and microscience, engineering, technology, and medicine series
Include bibliographical references.
Microelectromechanical systems
Lyshevski, Sergey Edward.
