عنوان
پدید آورنده
موضوع
رده
TK,7871.85,.D79,1984
TK
,
7871
.
85
,.
D79
,
1984
کتابخانه
محل استقرار
0444869050
English Book
Dry etching for microelectronics
edited by Ronald A. Powell
Amsterdam ; New York
North-Holland Physics Pub. ; New York, N.Y. : Distributors for the USA and Canada, Elsevier Science Pub. Co.,
1984
xi, 299 p. ill. 24 cm.
ng Includes index.
Bibliography: p. 223-294.
Semiconductors- Etching
Plasma etching
621
.
381
,.
73
TK
,
7871
.
85
,.
D79
,
1984
Powell, Ronald A.
Series: Materials processing, theory and practices ;v. 4.
