عنوان

MEMS 2002 : the Fifteenth IEEE International Conference on Micro Electro Mecha nical Systems ; technical digest : las vegas, nevada, USA ,January 20

English Book

MEMS 2002 : the Fifteenth IEEE International Conference on Micro Electro Mecha nical Systems ; technical digest : las vegas, nevada, USA ,January 20

Sponsored by IEEE and the Robotics and Automation Society

Piscataway, NJ

IEEE

c2002

xliii, 736 p.: ill. ; 28cm

Includes bibliographical references and author index

Microelectromechanical systems -- Congresses

7874

2002

2002 : IEEE International Conference on Micro Mechanical Systems (15th.veN ,sageV saL : )

Title: Micro electro mechanical systems (MEMS 2002)